Title :
Rf sputtered CdS/CdTe solar cells: effects of magnetic field, RF power, target morphology, and substrate temperature
Author :
Compaan, A.D. ; Shao, M. ; Tabory, C.N. ; Feng, Z. ; Fischer, A. ; Matulionis, I. ; Bohn, R.G.
Author_Institution :
Dept. of Phys. & Astron., Toledo Univ., OH, USA
Abstract :
In this paper we present a study of the influence of substrate temperature, RF power, target erosion, and magnetic field configuration on RF sputtering of CdTe and CdS. These sputtering parameters are shown to affect deposition rate, film morphology, photoluminescence efficiency, and cell performance. The magnetic field shape and strength affects the charged particle flux on the growing film and appears to have a strong influence on the final cell performance
Keywords :
II-VI semiconductors; cadmium compounds; crystal morphology; magnetic fields; photoluminescence; semiconductor growth; semiconductor materials; semiconductor thin films; solar cells; sputtered coatings; substrates; CdS-CdTe; CdS/CdTe solar cells; RF power dependence; RF power effect; RF sputtering; cell performance; charged particle flux; deposition rate; film morphology; magnetic field dependence; magnetic field effect; magnetic field shape; magnetic field strength; optical emission spectroscopy; photoluminescence efficiency; plasma properties; substrate temperature dependence; substrate temperature effect; target erosion; target morphology effect; Magnetic fields; Magnetic films; Morphology; Photoluminescence; Photovoltaic cells; Radio frequency; Shape; Sputtering; Substrates; Temperature;
Conference_Titel :
Photovoltaic Energy Conversion, 1994., Conference Record of the Twenty Fourth. IEEE Photovoltaic Specialists Conference - 1994, 1994 IEEE First World Conference on
Conference_Location :
Waikoloa, HI
Print_ISBN :
0-7803-1460-3
DOI :
10.1109/WCPEC.1994.519820
