A comparison of Sliding Mode approaches to a nanometre position control application

Author

Stadler, Paul Andreas ; Dodds, Stephen James

Author_Institution

Oerlikon ESEC, Cham

fYear

2008

fDate

1-3 Sept. 2008

Firstpage

2543

Lastpage

2550

Abstract

A vacuum air bearing based linear drive is presented that is capable of precision positioning with a relative accuracy of a few nanometres. Three different control systems embodying sliding mode control (SMC) are compared by simulation and experiment regarding their individual positioning performance. The three control designs investigated are high gain SMC, a first order and a second order version of outer loop SMC where the inner loop consists of a forced dynamic control law (FDC, a special form of state space controller) applied to the linear drive to be positioned.

Keywords

damping; drives; machine bearings; position control; variable structure systems; forced dynamic control law; linear drive; nanometre position control; precision positioning; sliding mode approaches; sliding mode control; state space controller; vacuum air bearing; Coils; Damping; Force control; Nanometers; Position control; Robust control; Sliding mode control; State-space methods; Vacuum technology; Vibration control; Sliding mode control; active damping; electrical drive; modelling; motion control; robustness;

fLanguage

English

Publisher

ieee

Conference_Titel

Power Electronics and Motion Control Conference, 2008. EPE-PEMC 2008. 13th

Conference_Location

Poznan

Print_ISBN

978-1-4244-1741-4

Electronic_ISBN

978-1-4244-1742-1

Type

conf

DOI

10.1109/EPEPEMC.2008.4635646

Filename

4635646