Title :
A comparison of Sliding Mode approaches to a nanometre position control application
Author :
Stadler, Paul Andreas ; Dodds, Stephen James
Author_Institution :
Oerlikon ESEC, Cham
Abstract :
A vacuum air bearing based linear drive is presented that is capable of precision positioning with a relative accuracy of a few nanometres. Three different control systems embodying sliding mode control (SMC) are compared by simulation and experiment regarding their individual positioning performance. The three control designs investigated are high gain SMC, a first order and a second order version of outer loop SMC where the inner loop consists of a forced dynamic control law (FDC, a special form of state space controller) applied to the linear drive to be positioned.
Keywords :
damping; drives; machine bearings; position control; variable structure systems; forced dynamic control law; linear drive; nanometre position control; precision positioning; sliding mode approaches; sliding mode control; state space controller; vacuum air bearing; Coils; Damping; Force control; Nanometers; Position control; Robust control; Sliding mode control; State-space methods; Vacuum technology; Vibration control; Sliding mode control; active damping; electrical drive; modelling; motion control; robustness;
Conference_Titel :
Power Electronics and Motion Control Conference, 2008. EPE-PEMC 2008. 13th
Conference_Location :
Poznan
Print_ISBN :
978-1-4244-1741-4
Electronic_ISBN :
978-1-4244-1742-1
DOI :
10.1109/EPEPEMC.2008.4635646
