Title :
Ambient atmosphere effect on dry laser cleaning efficiencies for sub-micron particles on critical surfaces
Author :
Kudryashov, Sergey I. ; Allen, Susan D.
Author_Institution :
Dept. of Phys., Arkansas State Univ., AR, USA
Abstract :
The effects of viscous air drag and Brownian particle motion on dry laser cleaning efficiencies are discussed for 10-2-1 μm spherical particle contaminants on critical surfaces.
Keywords :
Brownian motion; laser materials processing; surface cleaning; viscosity; 10E-2 to 1 mum; Brownian particle motion; ambient atmosphere effect; critical surfaces; dry laser cleaning efficiencies; spherical particle contaminants; submicron particles; viscous air drag; Atmosphere; Atmospheric modeling; Cleaning; Drag; Gas lasers; Lasers and electrooptics; Semiconductor device modeling; Surface contamination; Surface emitting lasers; Tellurium;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.202263
