Title :
Profilometry using a frequency-shifted feedback laser
Author :
Ndiaye, Cheikh ; Hara, Takefumi ; Ito, Hiromasa
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
A frequency-shifted feedback laser is used as chirped light source for optical profilometry based on optical frequency-domain reflectometry. Measurement ranges of 1 m and accuracies better than 50 μm have been demonstrated.
Keywords :
chirp modulation; measurement by laser beam; phase shifting interferometry; reflectometry; surface topography measurement; chirped light source; feedback laser; frequency-shifted laser; optical frequency-domain reflectometry; optical profilometry; Chirp; Fiber lasers; Frequency measurement; Interference; Laser feedback; Light sources; Optical feedback; Optical interferometry; Ring lasers; State feedback;
Conference_Titel :
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN :
1-55752-795-4
DOI :
10.1109/CLEO.2005.202265
