Title :
Computational simulation of vibration displacement on piezoelectric quartz crystal using finite element method
Author :
Kurosawa, Chikako ; Kurosawa, Shigeru ; Aizawa, Hidenobu ; Horibe, Tadashi
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Ibaraki, Japan
Abstract :
Recently, piezoelectric quartz crystals have found wide applications as chemical and biosensors. The quartz crystal microbalance (QCM) is a well-known technique for mass sensing using the mass-loading transduction property for frequency shift. The behavior of the vibration displacement of the electrode surface on the QCM for various applied voltages is an important problem for understanding the physical property of the QCM, but it is very difficult to detect the displacement. In this paper, the effects of resonant frequency of the QCM caused by the variation of the applied voltage are studied by using finite element method (FEM) software.
Keywords :
crystal resonators; displacement measurement; finite element analysis; mass measurement; microbalances; FEM; QCM resonant frequency; SiO2; finite element method; frequency shift determination; mass sensing; mass-loading transduction; piezoelectric quartz crystal vibration displacement; quartz crystal microbalance; Chemical industry; Chemical technology; Computational modeling; Electrodes; Equations; Finite element methods; Frequency; Piezoelectric effect; Stress; Voltage;
Conference_Titel :
Frequency Control Symposium and Exposition, 2004. Proceedings of the 2004 IEEE International
Print_ISBN :
0-7803-8414-8
DOI :
10.1109/FREQ.2004.1418518