Computational simulation of vibration displacement on piezoelectric quartz crystal using finite element method

Recently, piezoelectric quartz crystals have found wide applications as chemical and biosensors. The quartz crystal microbalance (QCM) is a well-known technique for mass sensing using the mass-loading transduction property for frequency shift. The behavior of the vibration displacement of the electrode surface on the QCM for various applied voltages is an important problem for understanding the physical property of the QCM, but it is very difficult to detect the displacement. In this paper, the effects of resonant frequency of the QCM caused by the variation of the applied voltage are studied by using finite element method (FEM) software.