DocumentCode
2985801
Title
Hydrogenation Effects on Polysilicon Thin Film Transistor Structures
Author
Hatalis, M.K. ; Kung, J.H. ; Kanicki, J.
Author_Institution
Lehigh University
fYear
1992
fDate
21-24 June 1992
Keywords
Dielectrics; Frequency; Hydrogen; Plasma applications; Plasma devices; Plasma displays; Plasma measurements; Plasma properties; Stress; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 1992. Digest. 50th Annual
Conference_Location
Cambridge, MA, USA
Type
conf
DOI
10.1109/DRC.1992.671898
Filename
671898
Link To Document