Title :
Experimental study of temperature effects in vibrating beam and thickness-shear resonators of GaPO4 machined by ultrasonic milling
Author :
Delmas, L. ; Sthal, F. ; Bigler, E. ; Boy, J.J. ; Galliou, S. ; Bourquin, R.
Author_Institution :
Dept. LCEP, UMR CNRS 6174, Besancon, France
Abstract :
We report progress in modeling and measuring temperature effects in vibrating beam gallium orthophosphate (GaPO4) resonators. In addition to the well known thickness-shear AT-cut, temperature compensated cuts exist in GaPO4 for length extensional, flexural and torsional modes. Analytical models of temperature effects are compared with experimental measurements on devices fabricated on AT (Y-16.1°) and Z-cut plates by ultrasonic machining. The agreement between theory and experiment is fairly good taking into account that temperature coefficients of GaPO4 have been experimentally tested for only a few thickness-shear resonators.
Keywords :
crystal resonators; gallium compounds; temperature; ultrasonic machining; vibrations; GaPO4; Z-cut plates; flexural modes; gallium orthophosphate resonators; length extensional modes; temperature compensated cuts; temperature effects; thickness-shear AT-cut; thickness-shear resonators; torsional modes; ultrasonic machining; ultrasonic milling; vibrating beam resonators; Abrasives; Analytical models; Electrodes; Ferroelectric materials; Machining; Milling; Shape; Temperature measurement; Ultrasonic variables measurement; Vibration measurement;
Conference_Titel :
Frequency Control Symposium and Exposition, 2004. Proceedings of the 2004 IEEE International
Print_ISBN :
0-7803-8414-8
DOI :
10.1109/FREQ.2004.1418534
