DocumentCode
2985939
Title
Piezoelectricity in poled silica films achieved using super-lattice structure with tetravalent metal dopants
Author
Noge, Satoru ; Shiroishi, Makoto ; Uno, Takehiko
Author_Institution
Dept. of Electr. & Electron. Eng., Kanagawa Inst. of Technol., Japan
fYear
2004
fDate
23-27 Aug. 2004
Firstpage
630
Lastpage
633
Abstract
We previously reported piezoelectricity in thin films of poled silica glass doped with germanium (Ge:SiO2). Similarly, tetravalent-metal-doped SiO2 (M4+:SiO2) films were prepared on Si substrates by RF magnetron sputtering for this experiment. We used germanium, titanium, and tin as the doping materials. We compared the piezoelectricity of the films with the piezoelectricity of quartz. Piezoelectricity with the same order of magnitude as that in quartz was observed in the M4+:SiO2 films. However, less than a week later, the piezoelectricity disappeared almost completely in all the samples. To prevent this in the poled M4+:SiO2 films, we have tried to pin the displacement of the doping ions with a poling treatment. We have developed a pinning technique based on the structure of a Ge:SiO2-Ti:SiO2-Sn:SiO2 super-lattice. This super-lattice structure was very effective in preventing the piezoelectricity from disappearing. It is known that an anomalous photovoltaic effect only exists in materials with spontaneous polarization. In the M+4:SiO2 super-lattice film, an anomalous photovoltaic phenomenon could clearly be observed. Therefore, the poled super-lattice silica film was piezoelectric.
Keywords
doping; germanium; photovoltaic effects; piezoelectric thin films; piezoelectricity; polarisation; quartz; silicon; sputter deposition; substrates; superlattices; tin; titanium; RF magnetron sputtering; Si; SiO2:Ge; SiO2:Sn; SiO2:Ti; anomalous photovoltaic effect; doped silica films; germanium dopant; piezoelectricity; poled silica films; quartz; silicon substrates; spontaneous polarization; super-lattice structure; tetravalent metal dopants; tin dopant; titanium dopant; Doping; Germanium; Glass; Piezoelectric films; Piezoelectricity; Radio frequency; Semiconductor films; Silicon compounds; Sputtering; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium and Exposition, 2004. Proceedings of the 2004 IEEE International
ISSN
1075-6787
Print_ISBN
0-7803-8414-8
Type
conf
DOI
10.1109/FREQ.2004.1418535
Filename
1418535
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