• DocumentCode
    2985939
  • Title

    Piezoelectricity in poled silica films achieved using super-lattice structure with tetravalent metal dopants

  • Author

    Noge, Satoru ; Shiroishi, Makoto ; Uno, Takehiko

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Kanagawa Inst. of Technol., Japan
  • fYear
    2004
  • fDate
    23-27 Aug. 2004
  • Firstpage
    630
  • Lastpage
    633
  • Abstract
    We previously reported piezoelectricity in thin films of poled silica glass doped with germanium (Ge:SiO2). Similarly, tetravalent-metal-doped SiO2 (M4+:SiO2) films were prepared on Si substrates by RF magnetron sputtering for this experiment. We used germanium, titanium, and tin as the doping materials. We compared the piezoelectricity of the films with the piezoelectricity of quartz. Piezoelectricity with the same order of magnitude as that in quartz was observed in the M4+:SiO2 films. However, less than a week later, the piezoelectricity disappeared almost completely in all the samples. To prevent this in the poled M4+:SiO2 films, we have tried to pin the displacement of the doping ions with a poling treatment. We have developed a pinning technique based on the structure of a Ge:SiO2-Ti:SiO2-Sn:SiO2 super-lattice. This super-lattice structure was very effective in preventing the piezoelectricity from disappearing. It is known that an anomalous photovoltaic effect only exists in materials with spontaneous polarization. In the M+4:SiO2 super-lattice film, an anomalous photovoltaic phenomenon could clearly be observed. Therefore, the poled super-lattice silica film was piezoelectric.
  • Keywords
    doping; germanium; photovoltaic effects; piezoelectric thin films; piezoelectricity; polarisation; quartz; silicon; sputter deposition; substrates; superlattices; tin; titanium; RF magnetron sputtering; Si; SiO2:Ge; SiO2:Sn; SiO2:Ti; anomalous photovoltaic effect; doped silica films; germanium dopant; piezoelectricity; poled silica films; quartz; silicon substrates; spontaneous polarization; super-lattice structure; tetravalent metal dopants; tin dopant; titanium dopant; Doping; Germanium; Glass; Piezoelectric films; Piezoelectricity; Radio frequency; Semiconductor films; Silicon compounds; Sputtering; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and Exposition, 2004. Proceedings of the 2004 IEEE International
  • ISSN
    1075-6787
  • Print_ISBN
    0-7803-8414-8
  • Type

    conf

  • DOI
    10.1109/FREQ.2004.1418535
  • Filename
    1418535