DocumentCode
2986246
Title
The physics and limits of femtosecond laser micromachining
Author
Ke, Kevin ; Joglekar, Ajit P. ; Liu, Hsiao-Hua ; Meyhöfer, Edgar ; Hasselbrink, Ernest ; Mourou, Gerard ; Hunt, Alan J.
Author_Institution
Dept. of Biomed. Eng., Michigan Univ., Ann Arbor, MI, USA
Volume
3
fYear
2005
fDate
22-27 May 2005
Firstpage
1912
Abstract
Laser-induced optical breakdown by femtosecond pulses is extraordinarily precise when the energy is near threshold. We examine the limits of femtosecond machining through studies of damage induced by tightly focused pulses in a variety of materials.
Keywords
electric breakdown; high-speed optical techniques; laser beam effects; laser beam machining; laser materials processing; micromachining; optical fabrication; optical focusing; femtosecond laser micromachining; femtosecond machining; femtosecond pulses; laser-induced optical breakdown; Electric breakdown; Electrons; Ionization; Laser theory; Machining; Micromachining; Optical materials; Photonic band gap; Physics; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN
1-55752-795-4
Type
conf
DOI
10.1109/CLEO.2005.202317
Filename
1573383
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