Title :
Apparent Positive Carrier Conduction In SiO/sub 2/ Films And Implications For Mosfet Scaling
Author :
Harrell, W.R. ; Frey, J.
Author_Institution :
University of Maryland
Keywords :
Conductive films; Current measurement; Electron emission; Electron traps; Equations; Hot carrier effects; Hot carriers; MOS capacitors; MOSFET circuits; Voltage;
Conference_Titel :
Device Research Conference, 1992. Digest. 50th Annual
Conference_Location :
Cambridge, MA, USA
DOI :
10.1109/DRC.1992.671906
