DocumentCode

2987748

Title

Thermal Instability In P-channel Transistors With Deoxidized Nitrided Oxide Gate Dielectrics

Author

Fishbein, B. ; Doyle, B. ; Conran, C.

Author_Institution

Digital Equipment Corporation

fYear

1992

fDate

21-24 June 1992

Keywords

Degradation; Dielectrics; Hot carriers; Temperature; Thermal stresses; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 1992. Digest. 50th Annual

Conference_Location

Cambridge, MA, USA

Type

conf

DOI

10.1109/DRC.1992.671907

Filename

671907