Title :
Thermal Instability In P-channel Transistors With Deoxidized Nitrided Oxide Gate Dielectrics
Author :
Fishbein, B. ; Doyle, B. ; Conran, C.
Author_Institution :
Digital Equipment Corporation
Keywords :
Degradation; Dielectrics; Hot carriers; Temperature; Thermal stresses; Voltage;
Conference_Titel :
Device Research Conference, 1992. Digest. 50th Annual
Conference_Location :
Cambridge, MA, USA
DOI :
10.1109/DRC.1992.671907
