DocumentCode
2987932
Title
Fiber laser driven EUV generation
Author
Chang, Yu-Chung ; Mordovanakis, Aghapi ; Kai-Chung Hou ; Nees, John ; Hou, Kai-Chung ; Maksimchuk, Anatoly ; Mourou, Gerard ; Galvanauskas, Almantas
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Volume
3
fYear
2005
fDate
22-27 May 2005
Firstpage
2200
Abstract
Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.
Keywords
fibre lasers; high-speed optical techniques; plasma production by laser; ultraviolet lithography; ultraviolet sources; EUV generation; EUV lithography; laser-plasma-production; pulsed fiber laser; Fiber lasers; Laser beams; Laser theory; Lithography; Optical amplifiers; Optical pulse generation; Power lasers; Pulse amplifiers; Ultraviolet sources; X-ray lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2005. (CLEO). Conference on
Print_ISBN
1-55752-795-4
Type
conf
DOI
10.1109/CLEO.2005.202416
Filename
1573482
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