Title :
A Bayesian approach to variable screening for modeling the IC fabrication process
Author :
Niu, Xinhui ; Brockman, Jay B.
Author_Institution :
Dept. of Comput. Sci. & Eng., Notre Dame Univ., IN, USA
fDate :
30 Apr-3 May 1995
Abstract :
We describe a technique for determining the set of input variables that are significant with respect to a set of fabrication process output variables. Our technique uses a Bayesian analysis approach to focus only on the “active” factors while ignoring those that are statistically insignificant. Macromodels are then built using those “active” factors. This approach results in reduced simulation models with high accuracy
Keywords :
Bayes methods; circuit optimisation; digital simulation; integrated circuit modelling; integrated circuit yield; semiconductor process modelling; Bayesian approach; IC fabrication process; active factors; input variables; macromodels; process modeling; process output variables; reduced simulation models; variable screening; Bayesian methods; Circuit simulation; Computer science; Costs; Design for experiments; Fabrication; Fluctuations; Input variables; Integrated circuit modeling; Problem-solving;
Conference_Titel :
Circuits and Systems, 1995. ISCAS '95., 1995 IEEE International Symposium on
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2570-2
DOI :
10.1109/ISCAS.1995.520366
