Ka-Band Low-Loss and High-Isolation 0.13 μm CMOS SPST/SPDT Switches Using High Substrate Resistance

This paper presents 35 GHz single-pole-single-throw (SPST) and single-pole-double-throw (SPDT) CMOS switches using a 0.13 mum BiCMOS process (IBM 8 HP). The CMOS transistors are designed to have a high substrate resistance to minimize the insertion loss and improve power handling capability. The SPST/SPDT switches have a insertion loss of 1.8 dB/2.2 dB, respectively, and an input 1-dB compression point (P1 dB) greater than 22 dBm. The isolation is greater than 30 dB at 35-40 GHz and is achieved using two parallel resonant networks. To our knowledge, this is the first demonstration of low-loss, high-isolation CMOS switches at Ka-band frequencies.