Title :
2006 IEEE International Conference on Semiconductor Electronics
fDate :
Oct. 29 2006-Dec. 1 2006
Abstract :
The following topics are dealt: MEMS; sensors; actuators; nanoelectronics; semiconductor devices; and integrated circuits.
Keywords :
actuators; integrated circuit design; micromechanical devices; nanoelectronics; semiconductor devices; sensors; MEMS; actuator applications; integrated circuit design; nanoelectronics; semiconductor devices; sensor applications;
Conference_Titel :
Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
0-7803-9730-4
Electronic_ISBN :
0-7803-9731-2
DOI :
10.1109/SMELEC.2006.380998
