Title :
Control of semiconductor manufacturing: curriculum development under an NSF combined research-curriculum grant
Author :
Khargonekar, Pramod P. ; Terry, Fred L., Jr.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
In this paper, the authors describe their NSF sponsored research-curriculum program devoted to the topic of modeling and control of semiconductor manufacturing. The paper is focused for the most part on the curriculum development under this program
Keywords :
control engineering education; electronic engineering education; integrated circuit manufacture; process control; semiconductor device manufacture; NSF sponsored research-curriculum program; curriculum development; semiconductor manufacturing; Curriculum development; Feedback control; Manufacturing processes; Microelectronics; Plasma applications; Plasma displays; Plasma materials processing; Process control; Semiconductor device manufacture; Virtual manufacturing;
Conference_Titel :
American Control Conference, Proceedings of the 1995
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2445-5
DOI :
10.1109/ACC.1995.520910
