Optimization of the Temperature Sensor Position for MEMS Gas Flow Meters

Author

AbbaspourSani, E. ; Javan, D.

Author_Institution

Urmia Univ., Urmia

fYear

2006

fDate

Oct. 29 2006-Dec. 1 2006

Firstpage

1

Lastpage

3

Abstract

A bulk micromachined structure for a thermal type gas flow meter is proposed. It is considered as the thermal type device and consists of a micro heater and two temperature sensors situated at both sides of the heating element. The sensor works on the bases of displacement of temperature profile around the heating element with the gas flow. The heater and the temperature sensors are assumed to be situated on a stacked (SiO₂ / Si₃N₄) thermally isolated membrane. The effect of the distance of the temperature sensor from the heating element on the output signal is investigated using Ansys/Flotran software. The simulation results for a specified device provide the optimum distance between the central heating element and two sensing elements in the range of 200 mum.

Keywords

finite element analysis; flow sensors; flowmeters; membranes; microfluidics; micromachining; microsensors; optimisation; silicon compounds; temperature sensors; Ansys-Flotran software; MEMS gas flow meters; SiO₂-Si₃N₄; bulk micromachined structure; central heating element; finite element method; micro heater; temperature profile displacement; temperature sensor position optimization; thermal type device; thermally isolated membrane; Biomembranes; Fluid flow; Fluid flow measurement; Gas detectors; Heating; Micromechanical devices; Resistors; Temperature sensors; Thermal sensors; Ultrasonic variables measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on

Conference_Location

Kuala Lumpur

Print_ISBN

0-7803-9730-4

Electronic_ISBN

0-7803-9731-2

Type

conf

DOI

10.1109/SMELEC.2006.381008

Filename

4266558