DocumentCode
2989644
Title
Fabrication Study of Solid Microneedles Array Using HNA
Author
Aziz, Norazreen Abd ; Majlis, Burhanuddin Yeop
Author_Institution
Univ. Kebangsaan Malaysia, Bangi
fYear
2006
fDate
Oct. 29 2006-Dec. 1 2006
Firstpage
20
Lastpage
24
Abstract
This paper presents an approach for the process development of the out of plane silicon microneedles array fabrication. This study utilizes the wet etching technology using HNA to build a structure of sharp-tipped microneedles; biconvex-conical shaped. The height of the fabricated microneedle is 41.8 mum and the tip radii is 1.4 mum. Investigation on the effect of varying the mask opening window had been carried out. The design approach and the fabrication process are well explained here.
Keywords
drug delivery systems; etching; masks; micromechanical devices; needles; silicon; HNA; Si; biconvex conical microneedles; mask opening window; out of plane silicon microneedle array; size 1.4 mum; size 41.8 mum; solid microneedle array fabrication; wet etching; Drug delivery; Dry etching; Fabrication; Needles; Shafts; Shape; Silicon; Skin; Solids; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
Conference_Location
Kuala Lumpur
Print_ISBN
0-7803-9730-4
Electronic_ISBN
0-7803-9731-2
Type
conf
DOI
10.1109/SMELEC.2006.381012
Filename
4266562
Link To Document