DocumentCode
298982
Title
Modelling and analysis for control of induction plasma deposition
Author
Smith, Carl W. ; Sikka, Mohinder S. ; Gevelber, Michael A.
Author_Institution
Dept. of Manuf. Eng., Boston Univ., MA, USA
Volume
2
fYear
1995
fDate
21-23 Jun 1995
Firstpage
1225
Abstract
A low order nonlinear dynamic model (LOM) of the induction plasma deposition (IPD) process has been developed and analysed to obtain insight into the design of an appropriate feedback control structure
Keywords
control system synthesis; feedback; plasma deposition; process control; feedback control structure; induction plasma deposition; low order nonlinear dynamic model; Coatings; Coils; Fluid flow; Heat transfer; Plasma accelerators; Plasma density; Plasma materials processing; Plasma properties; Plasma sheaths; Plasma temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, Proceedings of the 1995
Conference_Location
Seattle, WA
Print_ISBN
0-7803-2445-5
Type
conf
DOI
10.1109/ACC.1995.520945
Filename
520945
Link To Document