Title :
Silicon-based micro-sensor for electrical resistance tomography
Author :
Liling, Sun ; York, Trevor ; Gregory, Chris ; Hatfield, J.
Author_Institution :
Xi´´an 771 Microelectron. Technol. Inst., China
Abstract :
Electrical Resistance Tomography.(ERT) has been investigated intensively in the past few years. This paper will present a very small silicon based microsensor made by the standard IC fabrication process. Compared with the existing small-scale ERT sensors, the electrodes of this sensor are more accurate in size and position, because of the IC process.
Keywords :
electric impedance imaging; elemental semiconductors; etching; microelectrodes; micromachining; microsensors; silicon; Si; anisotropic etching; electrical resistance tomography; epoxy adhesive; hole etching; impedance analysis; micromachining process; process tomography; sensor electrodes; silicon-based microsensor; standard IC fabrication process; Anisotropic magnetoresistance; Artificial intelligence; Conducting materials; Electric resistance; Electrodes; Etching; Fabrication; Image sensors; Silicon; Tomography;
Conference_Titel :
Electronic Packaging Technology Proceedings, 2003. ICEPT 2003. Fifth International Conference on
Conference_Location :
Shanghai, China
Print_ISBN :
0-7803-8168-8
DOI :
10.1109/EPTC.2003.1298725
