DocumentCode
2989981
Title
Analysis of a Bilaminar Circular Piezoelectric Actuator for Micropumps
Author
Johari, Juliana ; Majlis, Burhanuddin Yeop
Author_Institution
Univ. Kebangsaan Malaysia, Bangi
fYear
2006
fDate
Oct. 29 2006-Dec. 1 2006
Firstpage
106
Lastpage
111
Abstract
This paper presents a general approach to the problem of modeling diaphragm micropumps. This study utilized the finite element method to optimize the deflection of a bilaminar circular plate which consist of a single piezoelectric disc as an actuator and bonded to an elastic diaphragm of certain dimensions. Optimum actuator dimensions were fixed for a determined diaphragm dimensions.
Keywords
diaphragms; finite element analysis; micropumps; piezoelectric actuators; bilaminar circular piezoelectric actuator analysis; bilaminar circular plate; diaphragm micropump modeling; elastic diaphragm; finite element method; micropumps; optimum actuator; piezoelectric disc; Biomembranes; Bonding; Capacitive sensors; Finite element methods; Microfluidics; Micropumps; Nanoelectronics; Optimization methods; Piezoelectric actuators; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
Conference_Location
Kuala Lumpur
Print_ISBN
0-7803-9730-4
Electronic_ISBN
0-7803-9731-2
Type
conf
DOI
10.1109/SMELEC.2006.381029
Filename
4266579
Link To Document