Title :
Application of Full Factorial Design Method in MEMS Capacitive Thermal Sensor Sensitivity
Author :
Mehrban, Mehdi ; Kouravand, Shahriar ; Rezazadeh, Ghader ; Donyavi, Ali
Author_Institution :
Urmia Univ., Urmia
fDate :
Oct. 29 2006-Dec. 1 2006
Abstract :
In this paper sensitivity of MEMS capacitive thermal sensors based on deflection of a bimetallic cantilever beam was investigated. Using design of experiment method, and applying a 25 factorial design the effect of factors in this sensor was calculated and main factors that affect on sensor´s sensitivity were identified. Analysis of variance for the main factors of design and their interactions were studied for their significance.
Keywords :
cantilevers; capacitive sensors; design of experiments; microsensors; sensitivity analysis; temperature sensors; 25 factorial design; MEMS capacitive thermal sensor sensitivity; bimetallic cantilever beam deflection; design of experiment; variance analysis; Capacitive sensors; Design methodology; Mechanical sensors; Micromechanical devices; Sensor systems; Structural beams; System performance; Temperature sensors; Thermal factors; Thermal sensors;
Conference_Titel :
Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
0-7803-9730-4
Electronic_ISBN :
0-7803-9731-2
DOI :
10.1109/SMELEC.2006.381042
