• DocumentCode
    2990271
  • Title

    Application of Full Factorial Design Method in MEMS Capacitive Thermal Sensor Sensitivity

  • Author

    Mehrban, Mehdi ; Kouravand, Shahriar ; Rezazadeh, Ghader ; Donyavi, Ali

  • Author_Institution
    Urmia Univ., Urmia
  • fYear
    2006
  • fDate
    Oct. 29 2006-Dec. 1 2006
  • Firstpage
    172
  • Lastpage
    176
  • Abstract
    In this paper sensitivity of MEMS capacitive thermal sensors based on deflection of a bimetallic cantilever beam was investigated. Using design of experiment method, and applying a 25 factorial design the effect of factors in this sensor was calculated and main factors that affect on sensor´s sensitivity were identified. Analysis of variance for the main factors of design and their interactions were studied for their significance.
  • Keywords
    cantilevers; capacitive sensors; design of experiments; microsensors; sensitivity analysis; temperature sensors; 25 factorial design; MEMS capacitive thermal sensor sensitivity; bimetallic cantilever beam deflection; design of experiment; variance analysis; Capacitive sensors; Design methodology; Mechanical sensors; Micromechanical devices; Sensor systems; Structural beams; System performance; Temperature sensors; Thermal factors; Thermal sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
  • Conference_Location
    Kuala Lumpur
  • Print_ISBN
    0-7803-9730-4
  • Electronic_ISBN
    0-7803-9731-2
  • Type

    conf

  • DOI
    10.1109/SMELEC.2006.381042
  • Filename
    4266592
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2990271