DocumentCode
2990290
Title
Design of a High Sensitivity Structure for MEMS Fingerprint Sensor
Author
Damghanian, Mitra ; Majlis, Burhanuddin Yeop
Author_Institution
Univ. Kebangsaan Malaysia, Bangi
fYear
2006
fDate
Oct. 29 2006-Dec. 1 2006
Firstpage
177
Lastpage
184
Abstract
A novel capacitive pressure sensor structure for fingerprint sensor/imager application is described which has higher sensitivity and linearity compared to all reported prototypes. The protrusion also has got a new shape to achieve the maximum sensitivity. Simulations have been done by FEM analysis and the results show the great improvements in output parameters. The technique can be applied to other capacitive structures as well.
Keywords
capacitive sensors; finite element analysis; microsensors; pressure sensors; MEMS fingerprint sensor; capacitive pressure sensor; finite element analysis; Capacitive sensors; Fabrication; Fingerprint recognition; Image matching; Image sensors; Linearity; Micromechanical devices; Parasitic capacitance; Sensor phenomena and characterization; Tactile sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
Conference_Location
Kuala Lumpur
Print_ISBN
0-7803-9730-4
Electronic_ISBN
0-7803-9731-2
Type
conf
DOI
10.1109/SMELEC.2006.381043
Filename
4266593
Link To Document