Title :
Design of a High Sensitivity Structure for MEMS Fingerprint Sensor
Author :
Damghanian, Mitra ; Majlis, Burhanuddin Yeop
Author_Institution :
Univ. Kebangsaan Malaysia, Bangi
fDate :
Oct. 29 2006-Dec. 1 2006
Abstract :
A novel capacitive pressure sensor structure for fingerprint sensor/imager application is described which has higher sensitivity and linearity compared to all reported prototypes. The protrusion also has got a new shape to achieve the maximum sensitivity. Simulations have been done by FEM analysis and the results show the great improvements in output parameters. The technique can be applied to other capacitive structures as well.
Keywords :
capacitive sensors; finite element analysis; microsensors; pressure sensors; MEMS fingerprint sensor; capacitive pressure sensor; finite element analysis; Capacitive sensors; Fabrication; Fingerprint recognition; Image matching; Image sensors; Linearity; Micromechanical devices; Parasitic capacitance; Sensor phenomena and characterization; Tactile sensors;
Conference_Titel :
Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
0-7803-9730-4
Electronic_ISBN :
0-7803-9731-2
DOI :
10.1109/SMELEC.2006.381043
