Title :
Pyrolytic deposition of metal films on substrates in conditions of the open atmosphere initiated by nanosecond laser irradiation
Author :
Chesnokov, D.V. ; Chesnokov, V.V.
Author_Institution :
Siberian State Geodesic Acad., Novosibirsk
Abstract :
The analysis of conditions of pyrolytic deposition of films of metals initiated by a nanosecond laser exposure of a substrate in a mixture of organometallic vapors with noble gas at atmospheric pressure are presented. The processes of pyrolysis can occur both in the adsorbed layer, and in a gas phase
Keywords :
MOCVD; laser deposition; metallic thin films; pyrolysis; adsorbed layer; atmospheric pressure; gas phase; laser pyrolysis; metal films; nanosecond laser irradiation; organometallic vapors; pyrolytic deposition; Atmosphere; Costs; Gas lasers; Laser excitation; Laser theory; Power lasers; Pump lasers; Substrates; Surface emitting lasers; Temperature distribution;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 2000. APEIE-2000. Volume 1. 2000 5th International Conference on Actual Problems of
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-5903-8
DOI :
10.1109/APEIE.2000.913085
