Analytical Model Studying of a Novel Tunable Capacitor Based on Bimetallic Thermal Actuator

This paper presents a novel tunable capacitor with bimetallic thermal actuator in micro scale which its design was based on the tip deflection of bimetallic cantilever beam. Thermo electro mechanical governing equations were derived. Design steps are described and calculated results show that using of the proposed tunable capacitor can achieve large tuning ratio.