Title :
Laser-incident angle optimization for measuring in-plane mode shapes in piezoelectric resonators with polished surfaces
Author :
Watanabe, Yasuaki ; Goka, Shigeyoshi ; Sekimoto, Hitoshi ; Yamamoto, Toru
Author_Institution :
Graduate Sch. of Eng., Tokyo Metropolitan Univ., Japan
Abstract :
Based on an optical reflection model in polished multilayered surfaces, reflectance and transmittance for the incident angle of the laser beam have been analyzed. The analysis demonstrates that the laser incident angle used in the previous experiment is optimum for measuring in-plane mode shapes in polished resonators with gold and chrome electrodes.
Keywords :
crystal resonators; laser beams; light transmission; multilayers; reflectivity; chrome electrodes; gold electrodes; in-plane mode shapes; laser beam; laser incident angle; laser-incident angle optimization; multilayered surfaces; optical reflection model; piezoelectric resonators; polished surfaces; reflectance; transmittance; Electrodes; Gold; Goniometers; Laser beams; Laser modes; Optical reflection; Optical resonators; Reflectivity; Shape measurement; Surface emitting lasers;
Conference_Titel :
Frequency Control Symposium and Exposition, 2005. Proceedings of the 2005 IEEE International
Print_ISBN :
0-7803-9053-9
DOI :
10.1109/FREQ.2005.1573920
