Title :
Degradation process research of microelectromechanical structures of pressure transducers
Author :
Adarchin, S.A. ; Kuzhnenkov, A.S.
Author_Institution :
Joint Stock Co. Autoelectronics, Kaluga, Russia
Abstract :
The paper analyses temperature hysteresis of pressure transducer output signal and reveals its regular change with time. A mathematical model of hysteresis temporal increase is created, and its effect on reliability of pressure transducers is determined
Keywords :
failure analysis; hysteresis; microsensors; piezoresistive devices; pressure transducers; semiconductor device reliability; 125 C; 25 C; control systems; degradation process; failure analysis; mathematical model; microelectromechanical structures; pressure transducers; reliability; temperature hysteresis; transducer output signal; Control systems; Degradation; Failure analysis; Hysteresis; Maintenance; Mathematical model; Microprocessors; Temperature measurement; Temperature sensors; Transducers;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 2000. APEIE-2000. Volume 1. 2000 5th International Conference on Actual Problems of
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-5903-8
DOI :
10.1109/APEIE.2000.913113
