Title :
Rotation-sensitive cuts for surface acoustic waves on LGT substrates
Author :
Chen, Zhijun ; Li, Lianger ; Han, Tao ; Shi, Wenkang ; Ji, Xiaojun ; Wang, Ji
Author_Institution :
Sch. of Electron. Inf., Shanghai Jiaotong Univ., China
Abstract :
Surface acoustic wave (SAW) sensor has many outstanding advantages as a new type sensor. The SAW rotation sensor which is used to sense rotation rate has already become one of the potential applications. Based on the wave equations on anisotropic piezoelectric crystal with rotation effect, some quantitative analyses of SAW rotation effect in X-cuts, Y-cuts and Z-cuts for the new piezoelectric material LGT are given in this paper. The rotation-sensitive cut (0°, 0°, 27°) Euler angle in Z-cuts are determined accordingly. On the other hand, the Euler angle (90°, 90°, 140°) cut is the lowest rotation-sensitive cut in all of the X-cuts, Y-cuts and Z-cuts, so it can be utilized in some SAW devices which need low rotation effect.
Keywords :
piezoelectric devices; piezoelectric materials; rotation; surface acoustic wave sensors; Euler angle; LGT piezoelectric material; LGT substrate; SAW rotation effect; anisotropic piezoelectric crystal; rotation sensor; rotation-sensitive cuts; surface acoustic wave sensor; Acoustic sensors; Acoustic waves; Acoustical engineering; Anisotropic magnetoresistance; Materials science and technology; Oceans; Partial differential equations; Piezoelectric materials; Sea surface; Surface acoustic waves;
Conference_Titel :
Frequency Control Symposium and Exposition, 2005. Proceedings of the 2005 IEEE International
Print_ISBN :
0-7803-9053-9
DOI :
10.1109/FREQ.2005.1573926