Title :
On the rectification of vibratory motion
Author_Institution :
Div. of Appl. Sci., Harvard Univ., Cambridge, MA, USA
Abstract :
The author establishes a theoretical framework for analyzing and classifying actuators which generate their output by rectifying small-amplitude mechanical vibrations such as might be generated by piezoelectric elements. These ideas are of interest when designing for microfabrication because motors based on these principles: (1) can generate translational output directly without use of rotary bearings; (2) appear to be scalable over several orders of magnitude of the length scale; and (3) appear to be capable of generating mechanical power proportional to driving frequency over several orders of magnitude of frequency. Achieving this performance is dependent on being able to fabricate features, or at least control surface irregularities, on the scale v/w where v is the velocity of the actuator and w is the operating frequency
Keywords :
piezoelectric devices; small electric machines; control surface irregularities; driving frequency; generating mechanical power proportional; microfabrication; piezoelectric elements; rectification of vibratory motion; rectifying small-amplitude mechanical vibrations; scalable; translational output; Electric motors; Electrostatics; Frequency; Micromotors; Piezoelectric actuators; Piezoelectric materials; Power generation; Torque; Velocity control; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Salt Lake City, UT
DOI :
10.1109/MEMSYS.1989.77960