Title :
Laser probing and FEM modeling of solidly mounted resonators
Author :
Tikka, P.T. ; Kaitila, J. ; Ella, J. ; Makkonen, T. ; Knuuttila, J.V. ; Westerholm, J. ; Salomaa, M.M.
Author_Institution :
Mater. Phys. Lab., Helsinki Univ. of Technol., Espoo, Finland
Abstract :
The ultrasonic vibrations of a solidly mounted resonator are probed utilizing a scanning laser interferometric technique. The vibrations are also simulated using a model of a solidly mounted resonator and applying 2D FEM modeling for the solution of the eigenmodes.
Keywords :
crystal resonators; eigenvalues and eigenfunctions; finite element analysis; light interferometry; probes; ultrasonic devices; FEM modeling; eigenmodes; laser probing; scanning laser interferometric technique; solidly mounted resonators; ultrasonic vibrations; Electrodes; Impedance; Laser modes; Laser theory; Optical materials; Optical resonators; Optical surface waves; Solid lasers; Solid modeling; Sputtering;
Conference_Titel :
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-5135-5
DOI :
10.1109/MWSYM.1999.779643
