Title :
Wavelength modulation over 500 kHz of micromechanically tunable InP-based VCSELs with Si-MEMS technology
Author :
Yano, T. ; Saito, H. ; Kanbara, N. ; Noda, R. ; Tezuka, S. ; Fujimura, N. ; Ooyama, M. ; Watanabe, T. ; Hirata, T. ; Nishiyama, N.
Author_Institution :
Yokogawa Electr. Corp., Yokohama
Abstract :
The wavelength modulation over 500 kHz of a micromechanically tunable VCSEL that consists of a InP-based half VCSEL chip and a micromachined SOI chip with a concave movable mirror has been demonstrated for the first time.
Keywords :
III-V semiconductors; indium compounds; laser cavity resonators; laser tuning; micro-optomechanical devices; mirrors; optical modulation; silicon-on-insulator; surface emitting lasers; InP; InP-based half VCSEL chip; Si-MEMS technology; Si-SiO2; concave movable mirror; micromachined SOI chip; micromechanically tunable VCSEL; wavelength modulation; Dielectric substrates; Frequency; Laser modes; Laser tuning; Mirrors; Silicon on insulator technology; Tunable circuits and devices; Vertical cavity surface emitting lasers; Voltage; Wavelength measurement;
Conference_Titel :
Semiconductor Laser Conference, 2008. ISLC 2008. IEEE 21st International
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-1782-7
Electronic_ISBN :
978-1-4244-1783-4
DOI :
10.1109/ISLC.2008.4636060
