Hierarchical dummy fill for process uniformity

To improve manufacturability and performance predictability, we seek to make a layout uniform with respect to prescribed density criteria, by inserting “fill” geometries into the layout. Previous approaches for flat layout density control are not scalable due to the necessity of solving very large linear programs, the large data volume of the solution, and the impact of hierarchy-breaking on verification. In this paper, we give the first methods for hierarchical layout density control for process uniformity. Our approach trades off naturally between runtime, solution quality, and output data volume. We also allow generation of compressed GDSII of fill geometries. Our experiments show that this hybrid hierarchical filling approach saves data volume and is scalable, while yielding solution quality that is competitive with existing Monte-Carlo and linear programming based approaches