Title :
The Energy Band Gap of AlxGa1-xN Thin Films as a Function of Al-Mole Fraction
Author :
Ng, S.S. ; Yam, F.K. ; Hassan, Zyad ; Hassan, Z.
Author_Institution :
Univ. Sains Malaysia, Penang
fDate :
Oct. 29 2006-Dec. 1 2006
Abstract :
In this work, the effects of Al mole fraction on energy band gap (Eg) of AlxGa1-xN epilayers grown on sapphire substrate are investigated. Attention is focused on the Ga- rich composition samples (0 les x < 0.10). The Al-mole fraction is determined by high- resolution X-ray diffraction (HR-XRD) spectroscopy. Ultraviolet-visible (UV-VIS) transmission and micro-photoluminescence (mu-PL) spectroscopy are employed to determine the energy band gap of the samples. The XRD results revealed that the Bragg angle of the rocking curve (RC) peak gradually increases as the Al-mole fraction increases, indicating the reductions in the lattice constant c of the alloys. By the application of Vegard´s law, the Al-mole fractions of AlxGa1-xN samples have been calculated. Overall, the UV-VIS transmission and mu-PL results showed that as the Al-mole fraction increases, blue shifts of the absorption edge and band edge emission are observed in all samples. These indicate the strong dependence of the band gap energy of AlxGa1-xN on the Al-mole fraction. Finally, the band gap energy of the AlxGa1-xN as a function of Al-mole fraction have been plotted and the energy band gap bowing parameter of 14.62 eV is obtained from the best fit of the non-linear interpolation of the UV-VIS transmission and the PL data.
Keywords :
III-V semiconductors; X-ray diffraction; aluminium compounds; energy gap; epitaxial growth; gallium compounds; lattice constants; photoluminescence; semiconductor epitaxial layers; semiconductor growth; ultraviolet spectra; visible spectra; wide band gap semiconductors; Al-mole fraction; Al2O3; AlGaN-Al2O3; Bragg angle; HR-XRD; Vegard´s law; absorption edge emission; band edge emission; blue shifts; energy band gap; epilayer growth; high-resolution X-ray diffraction spectra; lattice constant; microphotoluminescence spectra; nonlinear interpolation; rocking curve; sapphire substrate; ultraviolet-visible transmission spectra; Alloying; Lattices; Performance evaluation; Photonic band gap; Physics; Spectroscopy; Substrates; Transistors; Wavelength measurement; X-ray diffraction;
Conference_Titel :
Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
0-7803-9730-4
Electronic_ISBN :
0-7803-9731-2
DOI :
10.1109/SMELEC.2006.380776