Title :
Characterization of the Binary Micro-Grating Surface by Scanning White Light Interferometry
Author :
MaoQing Jiang ; Dazhi Zhang ; Xingxing Wang ; Yongqing Gong ; WenDong Zou
Author_Institution :
Key Lab. of Nondestructive Test (Minist. of Educ.), Nanchang HangKong Univ., Nanchang, China
Abstract :
We used scanning white-light interferometry(SWLI) for surface morphology characterization of binary micro-grating. The 3-D surface topography of specimen was rebuilt using cosine Fourier analysis algorithm and characterized with amplitude parameters. The fabrication errors of transverse width as well as longitudinal systematic and random etch-depth of the micro-grating device were calculated, respectively. Nanometers order of longitudinal resolution could be achieved with the SWLI, which could realize accurate quantitative characterization of surface topography of micro-grating, subsequently providing with objective reference basis for the assessment of fabrication deviation of binary optical element and the improvement of processing techniques.
Keywords :
CCD image sensors; Fourier analysis; diffraction gratings; light interferometry; nanofabrication; optical elements; surface morphology; surface topography; 3D surface topography; CCD camera; SWLI; amplitude parameters; binary micrograting surface; binary optical element fabrication deviation assessment; charge-coupled device; cosine Fourier analysis algorithm; longitudinal resolution; micrograting device; nanometer order; random etch-depth; scanning white light interferometry; surface morphology characterization; transverse width fabrication errors; Interference; Optical imaging; Optical interferometry; Optical surface waves; Surface morphology; Surface topography; Surface treatment;
Conference_Titel :
Photonics and Optoelectronics (SOPO), 2012 Symposium on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4577-0909-8
DOI :
10.1109/SOPO.2012.6270526
