Title :
Surface Reconstruction and Visualization Measurement in the Parallel Astigmatic Confocal System
Author :
Liu Wenwen ; Yu Xiaofen ; Zhao Jingjing
Author_Institution :
Sch. of Instrum. Sci. & Opto-Electron. Eng., Hefei Univ. of Technol., Hefei, China
Abstract :
In the parallel astigmatic confocal system, the in-focus positions of the whole-field probing points are extracted by means of searching the "zero" points at the detecting curves which come from the system\´s sequential images. A 3-D surface profile is reconstructed based on the "zero" points in the detecting curves, than the surface profile parameters of the microstructure are measured. Bi-cubic-spline interpolation curve surface fitting method is used to reconstruct the 3-D surface profile, which passes the in-focus position of the probing points. High subdivision rate can improve the geometric continuity and accuracy of the 3-D surface reconstructed. In the course of visualization measurement for the microstructure, the 3-D surface profile parameters are evaluated based on the points picked from the bi-cubic-spline interpolation curve surface rather than from the local triangular plane in the 3-D surface profile. The measurement accuracy for the 3-D profile parameters of the microstructure could be advanced.
Keywords :
curve fitting; data visualisation; image reconstruction; interpolation; solid modelling; splines (mathematics); surface fitting; surface reconstruction; 3D surface profile parameters; 3D surface profile reconstruction; bicubic-spline interpolation curve surface fitting method; detecting curves; geometric continuity; in-focus position; measurement accuracy; microstructure; parallel astigmatic confocal system; system sequential image; visualization measurement; whole-field probing points; zero points; Accuracy; Interpolation; Microstructure; Shape measurement; Splines (mathematics); Surface fitting; Surface reconstruction;
Conference_Titel :
Photonics and Optoelectronics (SOPO), 2012 Symposium on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4577-0909-8
DOI :
10.1109/SOPO.2012.6270530