Comparison of the performances of micropump with active type diaphragm actuated by several approaches

In this study, the performances of the micropump with active type diaphragm actuated by thermoelectric and piezoelectric have been compared. Finite element analysis (FEA) by ANSYS®8.1 had used to simulate and analyze the deflection of the diaphragm. The FEA model actuated by thermoelectric and piezoelectric is validated by the available data. The success of the model in predicting the displacement of the diaphragm provides further encouragement in using the model to compare the diaphragm deflection actuated by difference actuated method but with same diaphragm size and actuated power. The optimized design by using thermoelectric actuator has then been shown.