DocumentCode
2994732
Title
Recent Progress And Applications Of Vacuum Microelectronics In Japan
Author
Itoh, Junji
Author_Institution
Electrotechnical Laboratory
fYear
1993
fDate
12-15 Jul 1993
Firstpage
4
Lastpage
5
Keywords
Electron emission; Fabrication; Ferroelectric materials; Flat panel displays; Laboratories; Microelectronics; Oxidation; Physics; Sputter etching; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN
0-7803-0852-2
Type
conf
DOI
10.1109/IVMC.1993.700240
Filename
700240
Link To Document