A Novel Two-Dimensional Micro-Displacement Sensor Based on a New Optical Structure for Equal-Inclination Interference

A novel system of two-dimensional micro-displacement optical sensor is designed. This system is based on the equal-inclination interference principle in a rectangular optical cavity. By use of CCD technology and microcontroller, the signal collection, optoelectronic transform, information storage and data communication are completed; The visual display is realized by PC system and VB platform. The experimental results of fidelity simulation demonstrate that high sensitivity, up to level of 1μm~0.1μm, can be achieved. It can be used to perform the optical precision machining; the real-time measurement and monitoring of micro displacement and speed of some key hydraulic engineering and large buildings.