DocumentCode :
2995119
Title :
Micromachining Today
Author :
Muller, Richard S.
Author_Institution :
University of California
fYear :
1993
fDate :
12-15 Jul 1993
Firstpage :
7
Lastpage :
7
Keywords :
Actuators; Fabrication; Mechanical factors; Mechanical sensors; Microelectronics; Micromachining; Micromechanical devices; Optical films; Semiconductor films; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
Type :
conf
DOI :
10.1109/IVMC.1993.700242
Filename :
700242
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2995119
