Fundamental characteristics on plasma diagnoses of gas-jet type atmospheric pressure plasma

In this work, a device of the atmospheric pressure plasma source was experimentally investigated, and constructed as a coaxial arrangement with a high-voltage electrode and a dielectric tube. The plasma source at the atmospheric pressure condition was formed into He or Ar gas jet exposed to dielectric barrier discharges, which operated on AC high-voltage applied. The atmospheric pressure plasma flowed out from a nozzle at the end of the dielectric barrier discharge tube. In the plasma diagnoses, an electronic temperature was quantitatively evaluated by the optical emission spectroscopy. This paper presents the electrical discharge characteristics, plasma emission photograph and the spectrum for analyzing the plasma generation mechanism. The fundamental characteristics of the electronic temperature was discussed from the atmospheric pressure plasma conditions as a function of the experimental parameter such as the gas flow rate and the distance from ground electrode.