DocumentCode
2995330
Title
Arrays Of Gated Field-emitter Cones Having 0.32-μm Tip-to-tip Spacings
Author
Bozler, C.O. ; Harris, C. Thomas ; Rabe, Steffen ; Rathman, D.D. ; Goodhue, W.D. ; Hollis, Mark A.
Author_Institution
Massachusetts Institute of Technology
fYear
1993
fDate
12-15 Jul 1993
Firstpage
8
Lastpage
9
Keywords
Anodes; Application software; Breakdown voltage; Current density; Field emitter arrays; Ionization; Laboratories; Lithography; Power dissipation; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN
0-7803-0852-2
Type
conf
DOI
10.1109/IVMC.1993.700243
Filename
700243
Link To Document