Title :
An electrostatic microactuator for electro-mechanical relay
Author_Institution :
OMRON Tateisi Electron. Co., Kyoto, Japan
Abstract :
The author describes the design, the fabrication process, and the estimation of the characteristics of an electrostatic miniature relay. Its characteristics (contact force and response time) are estimated by the boundary-element method for the analysis of electrostatic fields. Problems regarding future development of the prototype and the future of microactuator technology and its applications are considered
Keywords :
boundary-elements methods; electric actuators; electrostatic devices; relays; BEM; boundary-element method; contact force; electro-mechanical relay; electromechanical relay; electrostatic fields; electrostatic microactuator; fabrication process; microactuator technology; miniature relay; response time; Electrodes; Electronics packaging; Electrostatics; Fabrication; Glass; Microactuators; Process design; Prototypes; Relays; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1989, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Salt Lake City, UT
DOI :
10.1109/MEMSYS.1989.77980
