DocumentCode
2995500
Title
A Super Steep Mo Tip Fea Fabrication And Emission Characteristics
Author
Imura, Hironori ; Makishima, Hideo ; Yamada, Kcizo
Author_Institution
NEC Corp.
fYear
1993
fDate
12-15 Jul 1993
Firstpage
10
Lastpage
11
Keywords
Apertures; Electron emission; Fabrication; Field emitter arrays; Microelectronics; National electric code; Scanning electron microscopy; Sensor phenomena and characterization; Standards development; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN
0-7803-0852-2
Type
conf
DOI
10.1109/IVMC.1993.700244
Filename
700244
Link To Document