Title :
Fabrication Of Silicon-column-field Emitters For Microwave Applications
Author :
Sune, C.T. ; Liu, J. ; Jones, G.W. ; Gray, H.F. ; Ball, C.
Author_Institution :
FED Corp.
Keywords :
Capacitance; Electron emission; Fabrication; Frequency; Laboratories; Materials science and technology; Microelectronics; Thermionic emission; Transconductance; Tunneling;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700247