DocumentCode

2996364

Title

A Study Of The Emission Characteristics Of All-metal Cold Cathodes

Author

Sokolich, M. ; Longo, R.T. ; Komm, D.S. ; Dibb, D.R. ; Arthur, A.

Author_Institution

Hughes Aircraft Company

fYear

1993

fDate

12-15 Jul 1993

Firstpage

19

Lastpage

20

Keywords

Apertures; Cathodes; Cleaning; Dielectrics; Field emitter arrays; Geometry; Leakage current; Plasma applications; Scanning electron microscopy; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International

Print_ISBN

0-7803-0852-2

Type

conf

DOI

10.1109/IVMC.1993.700249

Filename

700249