DocumentCode :
2996383
Title :
Process Characterization And Analysis Of Self-sealed Vacuum Microelectronic Devices
Author :
Mel, Q. ; Zurn, S. ; Polla, D.L.
Author_Institution :
University of Minnesota
fYear :
1993
fDate :
12-15 Jul 1993
Firstpage :
21
Lastpage :
22
Keywords :
Atomic force microscopy; Chemical analysis; Electron beams; Fabrication; Microelectronics; Micromachining; Silicon; Spectroscopy; Tungsten; Uninterruptible power systems;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
Type :
conf
DOI :
10.1109/IVMC.1993.700250
Filename :
700250
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2996383
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