DocumentCode
2996383
Title
Process Characterization And Analysis Of Self-sealed Vacuum Microelectronic Devices
Author
Mel, Q. ; Zurn, S. ; Polla, D.L.
Author_Institution
University of Minnesota
fYear
1993
fDate
12-15 Jul 1993
Firstpage
21
Lastpage
22
Keywords
Atomic force microscopy; Chemical analysis; Electron beams; Fabrication; Microelectronics; Micromachining; Silicon; Spectroscopy; Tungsten; Uninterruptible power systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN
0-7803-0852-2
Type
conf
DOI
10.1109/IVMC.1993.700250
Filename
700250
Link To Document