Title :
Fabrication of a MEMS deformable mirror for adaptive optics
Author :
Li, Jie ; Chen, Xiqu
Author_Institution :
Dept. of Electr. & Inf. Eng., Wuhan Polytech. Univ., Wuhan, China
Abstract :
A novel micro-deformable mirror with continuous facet is designed and fabricated in this paper. It consists of 49 electrostatically driven actuators, and its effective reflective surface is 900 millimeter square, which is a significant feature over other existed mirrors. Some processes are discussed in detail for mirror fabrication, in which a convex compensation method is designed for the anisotropic etching and a special structure is also used to improve the quality of anodic bonding.
Keywords :
adaptive optics; bonding processes; etching; micromechanical devices; micromirrors; MEMS deformable mirror; adaptive optics; anisotropic etching; anodic bonding; convex compensation method; electrostatically driven actuators; microstructure fabrication; mirror fabrication; Adaptive optics; Design engineering; Electrostatic actuators; Etching; Micromechanical devices; Mirrors; Optical device fabrication; Optical surface waves; Power engineering and energy; Silicon; MEMS; Microstucture fabrication; deformable micro-mirror;
Conference_Titel :
Optics Photonics and Energy Engineering (OPEE), 2010 International Conference on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-5234-7
Electronic_ISBN :
978-1-4244-5236-1
DOI :
10.1109/OPEE.2010.5508098
