Fabrication of a MEMS deformable mirror for adaptive optics

Author

Li, Jie ; Chen, Xiqu

Author_Institution

Dept. of Electr. & Inf. Eng., Wuhan Polytech. Univ., Wuhan, China

Volume

1

fYear

2010

fDate

10-11 May 2010

Firstpage

88

Lastpage

91

Abstract

A novel micro-deformable mirror with continuous facet is designed and fabricated in this paper. It consists of 49 electrostatically driven actuators, and its effective reflective surface is 900 millimeter square, which is a significant feature over other existed mirrors. Some processes are discussed in detail for mirror fabrication, in which a convex compensation method is designed for the anisotropic etching and a special structure is also used to improve the quality of anodic bonding.

Keywords

adaptive optics; bonding processes; etching; micromechanical devices; micromirrors; MEMS deformable mirror; adaptive optics; anisotropic etching; anodic bonding; convex compensation method; electrostatically driven actuators; microstructure fabrication; mirror fabrication; Adaptive optics; Design engineering; Electrostatic actuators; Etching; Micromechanical devices; Mirrors; Optical device fabrication; Optical surface waves; Power engineering and energy; Silicon; MEMS; Microstucture fabrication; deformable micro-mirror;

fLanguage

English

Publisher

ieee

Conference_Titel

Optics Photonics and Energy Engineering (OPEE), 2010 International Conference on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-5234-7

Electronic_ISBN

978-1-4244-5236-1

Type

conf

DOI

10.1109/OPEE.2010.5508098

Filename

5508098