An electrothermally-actuated, dual-mode micromirror for large bi-directional scanning

Author

Jain, Ankur ; Todd, Shane ; Xie, Huikai

Author_Institution

Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL, USA

fYear

2004

fDate

13-15 Dec. 2004

Firstpage

47

Lastpage

50

Abstract

We report a novel single-crystal-silicon (SCS)-based micromirror that can perform large bi-directional scans and can also generate large piston motion. The micromirror rotates over ±15° at less than 6 V dc voltage, and over ±43° (i.e., >170° optical scan angle) at its resonance of 2.4 kHz. A maximum vertical piston motion of 200 μm is also achieved with this 700 μm-by-320 μm device. A circuit model has been developed for electrothermal behavioral simulation and design optimization. The simulation results using the circuit model match the experimental data to within 8%.

Keywords

circuit simulation; integrated circuit modelling; micromechanical devices; micromirrors; optimisation; semiconductor device models; silicon; 2.4 kHz; 200 micron; Si; circuit model; design optimization; dual-mode micromirror; electrothermal behavioral simulation; electrothermally-actuated micromirror; large bi-directional scanning; maximum vertical piston motion; single-crystal-silicon -based micromirror; Actuators; Bidirectional control; Biomedical optical imaging; Electrothermal effects; Etching; Micromirrors; Mirrors; Optical interferometry; Pistons; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International

Print_ISBN

0-7803-8684-1

Type

conf

DOI

10.1109/IEDM.2004.1419060

Filename

1419060