Title :
Novel ferroelectrics-based micro-acoustic devices and their ultrasonic applications
Author :
Zhu, Yi-Ping ; Ren, Tian-Ling ; Yang, Yi ; Wu, Xiao-Ming ; Zhang, Ning-Xin ; Liu, Li-Tian ; Tan, Zhi-Min ; Wang, Hai-Ning ; Cai, Jian ; Wang, Shui-Di ; Li, Zhi-Jian
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
Novel ferroelectric thin film based micro-acoustic devices have been designed and fabricated using silicon based micro-machining process. These devices have excellent performance, miniature size and high reliability, and could be compatible with conventional integrated circuit process. And more important, they can be both used as microphone and microspeaker. The micro-acoustic devices could find wide and novel application in practical ultrasonic systems.
Keywords :
acoustic devices; ferroelectric thin films; micromachining; silicon; ultrasonic equipment; ferroelectric thin film; integrated circuit process; microacoustic devices; micromachining process; microphone; microspeaker; silicon; ultrasonic systems; Acoustic applications; Acoustic transducers; Biomembranes; Electrodes; Ferroelectric materials; Microphones; Nonhomogeneous media; Platinum; Silicon; Wet etching;
Conference_Titel :
Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International
Print_ISBN :
0-7803-8684-1
DOI :
10.1109/IEDM.2004.1419061
