Novel ferroelectrics-based micro-acoustic devices and their ultrasonic applications

Author

Zhu, Yi-Ping ; Ren, Tian-Ling ; Yang, Yi ; Wu, Xiao-Ming ; Zhang, Ning-Xin ; Liu, Li-Tian ; Tan, Zhi-Min ; Wang, Hai-Ning ; Cai, Jian ; Wang, Shui-Di ; Li, Zhi-Jian

Author_Institution

Inst. of Microelectron., Tsinghua Univ., Beijing, China

fYear

2004

fDate

13-15 Dec. 2004

Firstpage

51

Lastpage

54

Abstract

Novel ferroelectric thin film based micro-acoustic devices have been designed and fabricated using silicon based micro-machining process. These devices have excellent performance, miniature size and high reliability, and could be compatible with conventional integrated circuit process. And more important, they can be both used as microphone and microspeaker. The micro-acoustic devices could find wide and novel application in practical ultrasonic systems.

Keywords

acoustic devices; ferroelectric thin films; micromachining; silicon; ultrasonic equipment; ferroelectric thin film; integrated circuit process; microacoustic devices; micromachining process; microphone; microspeaker; silicon; ultrasonic systems; Acoustic applications; Acoustic transducers; Biomembranes; Electrodes; Ferroelectric materials; Microphones; Nonhomogeneous media; Platinum; Silicon; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International

Print_ISBN

0-7803-8684-1

Type

conf

DOI

10.1109/IEDM.2004.1419061

Filename

1419061