• DocumentCode
    2998579
  • Title

    Understanding of spin-on-glass (SOG) properties from their molecular structure

  • Author

    Chiang, Chien ; Fraser, David B.

  • Author_Institution
    Intel Corp., Santa Clara, CA, USA
  • fYear
    1989
  • fDate
    12-13 Jun 1989
  • Firstpage
    397
  • Lastpage
    403
  • Abstract
    A summary of various types of SOG materials and their properties is presented. The authors correlate these properties with molecular structure and constituents such as phosphorous and methyl dopants. Process integration issues associated with each type of SOG material are also discussed
  • Keywords
    VLSI; glass; insulating coatings; integrated circuit technology; metallisation; SOG materials; VLSI; constituents; methyl dopants; molecular structure; multilevel interconnection; properties; spin-on-glass; Dielectric materials; Doping; Electronics industry; Etching; Glass; Inorganic materials; Planarization; Semiconductor materials; Tensile stress; Viscosity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Multilevel Interconnection Conference, 1989. Proceedings., Sixth International IEEE
  • Conference_Location
    Santa Clara, CA
  • Type

    conf

  • DOI
    10.1109/VMIC.1989.78000
  • Filename
    78000
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2998579