Title :
Understanding of spin-on-glass (SOG) properties from their molecular structure
Author :
Chiang, Chien ; Fraser, David B.
Author_Institution :
Intel Corp., Santa Clara, CA, USA
Abstract :
A summary of various types of SOG materials and their properties is presented. The authors correlate these properties with molecular structure and constituents such as phosphorous and methyl dopants. Process integration issues associated with each type of SOG material are also discussed
Keywords :
VLSI; glass; insulating coatings; integrated circuit technology; metallisation; SOG materials; VLSI; constituents; methyl dopants; molecular structure; multilevel interconnection; properties; spin-on-glass; Dielectric materials; Doping; Electronics industry; Etching; Glass; Inorganic materials; Planarization; Semiconductor materials; Tensile stress; Viscosity;
Conference_Titel :
VLSI Multilevel Interconnection Conference, 1989. Proceedings., Sixth International IEEE
Conference_Location :
Santa Clara, CA
DOI :
10.1109/VMIC.1989.78000
